Txawm hais tias kev pab roj yog xav tau rau laser txiav silicon nitride (Si₃N₄) nyob ntawm cov khoom siv ntom ntom thiab tuab.
1. Daim ntawv thov Scenarios
----Porous, low-density Si₃N₄ (8mm): tuaj yeem txiav nrog 1kW QCW laser (ncej 3kW) siv cua thiab tshwj xeeb tsis; qhov zoo yog txais tau.
----Dense, kub-pressed Si₃N₄ (8mm): Txawm tias muaj 10kW ncov laser, nitrogen pab tau pom zoo. Cua yuav tsum zam.
2. Cov ntsiab lus tseem ceeb
Rau 8 hli tuab Si₃N₄, laser txiav cuam tshuam nrog thermal ablation thiab gasification. Assist gas plays peb lub luag haujlwm tseem ceeb:
---- Tshem tawm molten / vaporized residue: Cov kub kub ua rau molten Si thiab SiO₂; tsis muaj roj, lub kerf clogs, ua rau tsis tiav txiav los yog chipping.
---- Txias thiab tiv thaiv cov kab nrib pleb: Thick boards khaws cov thermal stress; gas tshem tawm cov cua sov, tiv thaiv kev puas tsuaj thiab ntug chipping.
---- Tshem tawm cov pa oxygen kom tsis txhob muaj oxidation: Cua lossis O₂ tsim cov txheej txheem oxide, ua kom tawv nqaij tawv, ua kom roughness, thiab txo lub zog.
3. Pab xaiv Gas
----High-purity nitrogen (N₂, 99.99%): Feem ntau siv thiab raug nqi; tiv thaiv oxidation, tshuab tawm cov khib nyiab, ua kom txias, thiab tawm mus kom huv si. Siab: 0.6-0.8 MPa. Haum rau clips, positioning clamps, complex qhov chaw, semiconductor, thiab NEV Cheebtsam.
----High-purity argon (Ar, 99.999%): Inert, me me tshav kub-cuam tshuam cheeb tsam, tsis tshua muaj du txiav nrog yuav luag xoom chipping. Zoo tagnrho rau automotive-qib thiab high-precision substrates tab sis kim.
---- Huab cua lossis O₂ txwv tsis pub: Ua rau kev txiav dub, burrs, tawg loj heev; tsis kam rau precision ceramics.
4. Cov kev ua tau zoo
---- Laser hom: Fiber laser / UV picosecond
---- Pab roj: High-purity N₂, 0.7MPa
---- Lub zog: Fiber laser 500-1000W
---- Txiav txoj kev: Layered nplhaib txiav, 3-4 hla kev tiv thaiv kev tawg
---- Ua kom pom tseeb: Kev tsom xam tsis zoo (hauv qab cov khoom siv saum npoo) ua kom zoo ib yam kerf
YCLaser muab kev ua laser rau ntau yam khoom tawv thiab nkig, nrog rau kev kuaj dawb thiab kev ua kom zoo dua qub.Tiv tauj peb rau kev daws teeb meem.
